The semiconductor device testing lab houses several of the centre's probe stations, along with high-end electronics characterisation equipment. The lab is set up to handle full wafers, up to 200 mm, with much of the equipment capable of automated device testing across the wafers.
Available equipment includes:
Cascade MicroTech Summit 12000
This is a high-precision probe station, with the capabilty to test at multiple temperatures. It has excellent performance for a wide range of applications. The setup in this lab inlcudes the options of both manual probes and probecard, and also connections to the evaluation board. Software control of the board allows for a high level of precise characterisation options.
- 200 mm probe system
- Automated testing
- EMI-shielded, light-tight and moisture-free test environment
- Temperature range of -60°C to 300°C
- Fast setup and test data gathering
Cascade MicroTech MPS150
The MPS150 is a modular probestation that can be configured for the needs of the user. The unit in this lab is setup for DC and AC electrical measurements, with vacuum connections to hold samples in place.
- 150 mm modular probe station
- Setup for IV and CV measurements
Keithley 4200A-SCS
The 4200A is the highest performance parameter analyzer. It delivers synchronising current-voltage, capacitance-voltage and ultra-fast pulsed I-V measurements. It is also useful for reliabilty and failure analysis studies, as well as process development.
- Parameter analyzer
- Four sourcemeter channels
- DC I-V, C-V, and pulsed I-V measurement types
- Automated real-time parameter extraction
